Low Voltage Imaging and X-Ray Microanalysis in the FE-SEM
نویسندگان
چکیده
منابع مشابه
Strategies for Low Accelerating Voltage X-ray Microanalysis of Sub-Micrometer Features with the FE-EPMA
X-ray microanalyses of sub-micrometer features require that a lower accelerating voltage be used. This reduction in the accelerating voltage reduces the penetrating distance of the beam electrons and thereby reduces the analytical volume. Two general strategies have been proposed for achieving the smallest analytical volume. The first approach involves significantly reducing the accelerating vo...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2010
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927610054632